(Accelerometers production technological process decomposition parameters model / I. Nevludov, V. Yevsieiev, S. Milutina, V. Bortnikova // Perspective Technologies and Methods in MEMS Design : proceedings of the XII International Conference ( MEMSTECH'2016), Lviv - Polyana Svalyava, Ukraine, April 20-24, 2016., 2016) Nevlydov, I.; Yevsieiev, V.; Miliutina, S.; Bortnikova, V.
In this paper the accelerometer production technological process parameters decomposition model is described.