Порівняння технологій виготовлення мікросмужкових сенсорів: фотолітографія, лазерне протравлення, механічне фрезерування

Abstract

The paper presents a comparative analysis of fabrication technologies for microstrip sensors, including photolithography, laser ablation, and CNC milling. The influence of geometric accuracy and edge roughness on electromagnetic characteristics such as impedance, resonance frequency, and quality factor in the GHz range is investigated. It is shown that fabrication tolerances significantly affect frequency stability and losses. Photolithography provides the highest precision, while laser processing ensures flexibility for rapid prototyping