Публікація: Impact of technological operations parameters on moems components formation
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Дата
2019
Назва журналу
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Видавництво
Анотація
In the paper the modeling results for the process of MOEMS functional surfaces shaping are presented. The significance and magnitude of factors that directly affect
the shaping process of MOEMS functional surfaces were determined.
Опис
Ключові слова
component, MOEMS, shaping, optical, switcher, micro mirror, grinding
Бібліографічний опис
Impact of technological operations parameters on moems components formation / O. Filipenko, O. Chala, V. Bortnikova, O. Sychova, I. Botsman // Conference on Advanced Optoelectronics and Lasers : proceedings of the IEEE 8th International Conference (CAOL'2019), Sozopol, Bulgaria, September 6-8, 2019. – P. 371–374.