Impact of technological operations parameters on moems components formation

Публікація:
Impact of technological operations parameters on moems components formation

dc.contributor.author	Filipenko, O.
dc.contributor.author	Chala, O.
dc.contributor.author	Bortnikova, V.
dc.contributor.author	Sychova, O.
dc.contributor.author	Botsman, I.
dc.date.accessioned	2023-04-13T16:17:40Z
dc.date.available	2023-04-13T16:17:40Z
dc.date.issued	2019
dc.description.abstract	In the paper the modeling results for the process of MOEMS functional surfaces shaping are presented. The significance and magnitude of factors that directly affect the shaping process of MOEMS functional surfaces were determined.
dc.identifier.citation	Impact of technological operations parameters on moems components formation / O. Filipenko, O. Chala, V. Bortnikova, O. Sychova, I. Botsman // Conference on Advanced Optoelectronics and Lasers : proceedings of the IEEE 8th International Conference (CAOL'2019), Sozopol, Bulgaria, September 6-8, 2019. – P. 371–374.
dc.identifier.uri	https://openarchive.nure.ua/handle/document/22616
dc.language.iso	en
dc.subject	component
dc.subject	MOEMS
dc.subject	shaping
dc.subject	optical
dc.subject	switcher
dc.subject	micro mirror
dc.subject	grinding
dc.title	Impact of technological operations parameters on moems components formation
dc.type	Conference proceedings
dspace.entity.type	Publication