Мікро- та наноелектромеханічні системи

Abstract

The development of micro- and nanoelectromechanical systems (MEMS and NEMS) has revolutionized various industries, including medicine, robotics, and telecommunications. These systems integrate mechanical and electronic components at the microscale and nanoscale to achieve high precision and efficiency. MEMS are widely used in sensors, actuators, and microfluidic devices, while NEMS are employed in quantum computing and ultra-sensitive detection applications. This study examines advancements in MEMS and NEMS technologies, focusing on their applications, fabrication methods, and future prospects in modern engineering.