Nano Devices and Microsystem Technologies: Brief Overview

Публікація:
Nano Devices and Microsystem Technologies: Brief Overview

dc.contributor.author	Sotnik, S.
dc.contributor.author	Lyashenko, V.
dc.contributor.author	Shakurova, T.
dc.date.accessioned	2021-11-29T19:26:25Z
dc.date.available	2021-11-29T19:26:25Z
dc.date.issued	2021
dc.description.abstract	The article provides brief overview of composition and principle of Nano devices and microsystem technology operation, which allows focusing on important micro processing technologies, which are proposed to be divided into 4 classes; analyzes principles of surface treatment technology – prospect of development and promotion of new range of intelligent materials, innovative architectures and technologies for their production.	uk_UA
dc.identifier.citation	Sotnik S., Lyashenko V., Shakurova T. Nano Devices and Microsystem Technologies: Brief Overview // International Journal of Engineering and Information Systems (IJEAIS). – 2021. – Vol. 5(11). – pp. 74-82.	uk_UA
dc.identifier.issn	2643-640X
dc.identifier.uri	https://openarchive.nure.ua/handle/document/18567
dc.language.iso	en	uk_UA
dc.publisher	IJEAIS	uk_UA
dc.subject	Nano Devices	uk_UA
dc.subject	Microsystem Technologies	uk_UA
dc.title	Nano Devices and Microsystem Technologies: Brief Overview	uk_UA
dc.type	Article	uk_UA
dspace.entity.type	Publication