Публікація: Nano Devices and Microsystem Technologies: Brief Overview
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Дата
2021
Автори
Назва журналу
ISSN журналу
Назва тома
Видавництво
IJEAIS
Анотація
The article provides brief overview of composition and principle of Nano devices and microsystem technology operation, which allows focusing on important micro processing technologies, which are proposed to be divided into 4 classes; analyzes principles of surface treatment technology – prospect of development and promotion of new range of intelligent materials, innovative architectures and technologies for their production.
Опис
Ключові слова
Nano Devices, Microsystem Technologies
Бібліографічний опис
Sotnik S., Lyashenko V., Shakurova T. Nano Devices and Microsystem Technologies: Brief Overview // International Journal of Engineering and Information Systems (IJEAIS). – 2021. – Vol. 5(11). – pp. 74-82.