Mathematical model of the development of manufacturing defects in the surface layer of substerates of moems’ functional components

Nevliudov, I.; Omarov, M.; Chala, O.

Публікація:
Mathematical model of the development of manufacturing defects in the surface layer of substerates of moems’ functional components

dc.contributor.author	Nevliudov, I.
dc.contributor.author	Omarov, M.
dc.contributor.author	Chala, O.
dc.date.accessioned	2020-08-27T13:31:15Z
dc.date.available	2020-08-27T13:31:15Z
dc.date.issued	2020
dc.description.abstract	A mathematical model of the development of manufacturing defects, with the prediction of the random component of the model in the substrates of functional components of MOEMS, which are made of semiconductors, in particular, silicon, are developed in the article. The main manufacturing defects that arise in the surface layer of the substrates of the MOEMS functional components taking into account the technological processes of their production and dynamic processes were used when developing the model. The developed mathematical model takes into account the occurrence of a random component of the model with its predictive ability. The possibility of such control is the basis for the development of the scientific direction of technology and equipment for the production of semiconductors, materials and electronic devices - defect engineering, based on the management and forecasting of defect formation processes.	uk_UA
dc.identifier.citation	Nevliudov I. Mathematical model of the development of manufacturing defects in the surface layer of substerates of moems’ functional components [Електронний ресурс] / I. Nevliudov, M. Omarov, O. Chala // ABSTRACT BOOK ICONAT 2020 INTERNATIONAL CONFERENCE ON NATURAL SCIENCES AND TECHNOLOGIES 20 August 2020-22 August 2020 Baku, Azerbaijan. – 2020. – Режим доступу до ресурсу: https://www.iconat-2020.com/.	uk_UA
dc.identifier.uri	http://openarchive.nure.ua/handle/document/12789
dc.language.iso	en	uk_UA
dc.subject	mathematical model	uk_UA
dc.subject	defect	uk_UA
dc.subject	MOEMS	uk_UA
dc.subject	functional components	uk_UA
dc.title	Mathematical model of the development of manufacturing defects in the surface layer of substerates of moems’ functional components	uk_UA
dc.type	Conference proceedings	uk_UA
dspace.entity.type	Publication