Automation of Mathematical Modeling of Physical and Technological Processes in the Electronic Devices Manufacture

Nevliudov, I.; Chala, O.; Botsman, I.; Klymenko, O.; Vzhesnievskyi, M.

Публікація:
Automation of Mathematical Modeling of Physical and Technological Processes in the Electronic Devices Manufacture

dc.contributor.author	Nevliudov, I.
dc.contributor.author	Chala, O.
dc.contributor.author	Botsman, I.
dc.contributor.author	Klymenko, O.
dc.contributor.author	Vzhesnievskyi, M.
dc.date.accessioned	2021-10-18T08:49:34Z
dc.date.available	2021-10-18T08:49:34Z
dc.date.issued	2021
dc.description.abstract	The variant of automation of the mathematical modeling process for forecasting the technological process parameters of manufacturing nano and microelectromechanical systems is proposed in the paper. For this task realization, a number of defects were identified and the causes of their occurrence were analyzed, as well as physical and technological transformations that occur in the substrates during technological processes. The software for automation of technological parameters forecasting process is developed and described.	uk_UA
dc.identifier.citation	Automation of Mathematical Modeling of Physical and Technological Processes in the Electronic Devices Manufacture / I. Nevliudov, O. Chala, I. Botsman, et al. // Functional Basis of Nanoelectronics : proceedings of the XIІ International Scientific Conference, Odessa, September 20-24, 2021. – Odessa, 2021. – Р. 74-77.	uk_UA
dc.identifier.uri	https://openarchive.nure.ua/handle/document/17949
dc.language.iso	en	uk_UA
dc.subject	production	uk_UA
dc.subject	microelectromechanical systems	uk_UA
dc.subject	silicon substarte	uk_UA
dc.subject	software	uk_UA
dc.subject	defect	uk_UA
dc.title	Automation of Mathematical Modeling of Physical and Technological Processes in the Electronic Devices Manufacture	uk_UA
dc.type	Abstract of Thesis	uk_UA
dspace.entity.type	Publication