Публікація: Automation of Mathematical Modeling of Physical and Technological Processes in the Electronic Devices Manufacture
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Дата
2021
Назва журналу
ISSN журналу
Назва тома
Видавництво
Анотація
The variant of automation of the mathematical modeling process for forecasting the technological process
parameters of manufacturing nano and microelectromechanical systems is proposed in the paper. For this task realization, a number of defects were identified and the causes of their occurrence were analyzed, as well as physical and technological transformations that occur in the substrates during technological processes. The software for automation of technological parameters forecasting process is developed and described.
Опис
Ключові слова
production, microelectromechanical systems, silicon substarte, software, defect
Бібліографічний опис
Automation of Mathematical Modeling of Physical and Technological Processes in the Electronic Devices Manufacture / Igor Nevliudov, Olena Chala, Iryna Botsman, Oleksandr Klymenko, Maksym Vzhesnievskyi // Proceedings of the XIІ International Scientific Conference «Functional Basis of Nanoelectronics» – Odessa, September 20-24, 2021. – РР. 74-77.