Influence of the Angle of Inclination of the Plasma Flow of Carbone to the Substrate on the Electrical Capacitance and Morphology of the Surface of Carbon Coatings.

Glukhov, O. V.; Sudzhanskaya, I. V.; Poplavsky, A. I.; Goncharov, I. Yu.

Публікація:
Influence of the Angle of Inclination of the Plasma Flow of Carbone to the Substrate on the Electrical Capacitance and Morphology of the Surface of Carbon Coatings.

dc.contributor.author	Glukhov, O. V.
dc.contributor.author	Sudzhanskaya, I. V.
dc.contributor.author	Poplavsky, A. I.
dc.contributor.author	Goncharov, I. Yu.
dc.date.accessioned	2020-08-03T11:31:15Z
dc.date.available	2020-08-03T11:31:15Z
dc.date.issued	2017
dc.description.abstract	Carbon film was obtained by pulsed vacuum-arc method on the silicon wafers. Method of impedance spectroscopy was obtained results change of electrical capacitance of parameters obtained carbon films. Morphology of surface produce by scanning probe microscopy methods was investigated. Determine correlation dependence between electrical capacity of carbon films and morphology surface against condition theirs obtainment. The explanation of the obtained results was proposed.	uk_UA
dc.identifier.citation	Influence of the Angle of Inclination of the Plasma Flow of Carbone to the Substrate on the Electrical Capacitance and Morphology of the Surface of Carbon Coatings / Glukhov O.V., Sudzhanskaya I.V., Poplavsky A.I., Goncharov I.Yu. // Journal of Nano- and Electronic Physics. - 2017. - Vol.9. - No.6. - p.06027 (3pp).	uk_UA
dc.identifier.other	DOI: 10.21272/jnep.9(6).06027
dc.identifier.uri	http://openarchive.nure.ua/handle/document/12627
dc.language.iso	en	uk_UA
dc.subject	Carbon films	uk_UA
dc.subject	Electrical capacity	uk_UA
dc.title	Influence of the Angle of Inclination of the Plasma Flow of Carbone to the Substrate on the Electrical Capacitance and Morphology of the Surface of Carbon Coatings.	uk_UA
dc.type	Article	uk_UA
dspace.entity.type	Publication