Публікація: Influence of the Angle of Inclination of the Plasma Flow of Carbone to the Substrate on the Electrical Capacitance and Morphology of the Surface of Carbon Coatings.
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Дата
2017
Назва журналу
ISSN журналу
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Видавництво
Анотація
Carbon film was obtained by pulsed vacuum-arc method on the silicon wafers. Method of impedance
spectroscopy was obtained results change of electrical capacitance of parameters obtained carbon films.
Morphology of surface produce by scanning probe microscopy methods was investigated. Determine correlation
dependence between electrical capacity of carbon films and morphology surface against condition
theirs obtainment. The explanation of the obtained results was proposed.
Опис
Ключові слова
Carbon films, Electrical capacity
Бібліографічний опис
Influence of the Angle of Inclination of the Plasma Flow of Carbone to the Substrate on the Electrical Capacitance and Morphology of the Surface of Carbon Coatings / Glukhov O.V., Sudzhanskaya I.V., Poplavsky A.I., Goncharov I.Yu. // Journal of Nano- and Electronic Physics. - 2017. - Vol.9. - No.6. - p.06027 (3pp).