Мікроелектромеханічні системи у сучасних наносенсорах

Abstract

Modern production is focused on minimizing the design and size of modern devices. This is achieved by introducing MEMS into production. Popularity of use in modern electronic devices MEMS is explained by a number of their main advantages: miniaturization, high functionality, reliability, low power consumption, integration of electronics with mechanical, optical and other nodes, high manufacturability and repeatability, the ability to achieve very low-cost (with large production volumes), small scatter of parameters within one batch of products. In the work the analysis of microconsole bending methods is conducted.