Кафедра мікроелектроніки, електронних приладів та пристроїв (МЕЕПП)
Постійний URI для цієї колекції
Перегляд
Перегляд Кафедра мікроелектроніки, електронних приладів та пристроїв (МЕЕПП) за автором "Beresnev, V. M."
Зараз показано 1 - 6 з 6
Результатів на сторінку
Варіанти сортування
Публікація Cathodic vacuum arc multilayer coatings (TiZrSiY)N/NbN : structure and properties depending on the deposition interval of alternate layers(2023) Beresnev, V. M.; Lytovchenko, S. V.; Azarenkov, M. O.; Maksakova, O. V.; Horokh, D. V.; Mazilin, B. O.; Kaynts, D.; Doshchechkina, I. V.; Gluhov, О. V.Two series of multilayer coatings with different numbers of bilayers (268 and 536, respectively) were synthesised using the cathodic vacuum-arc deposition (CVAD) with the simultaneous sputtering of two different cathodes. The first cathode was made of the multicomponent TiZrSiY material, and the second one was made of technical niobium. The coatings were condensed in a nitrogen atmosphere at a constant negative bias potential applied to the substrate. The resulting coatings have a distinct periodic structure composed of individual layers of (TiZrSiY)N and NbN with the thicknesses determined by the deposition interval (10 or 20 s, respectively). The total thicknesses of the coatings determined by the number of bilayers were 11 and 9 microns, respectively. The formation of polycrystalline TiN and NbN phases with grain size comparable to the size of the layers has been identified for both series of coatings. The layers exhibit a columnar structure growth with a predominant orientation (111). The hardness of the experimental coatings depends on the thickness of the layers and reaches 39.7 GPa for the coating with the smallest layer thickness. The friction coefficient of the obtained coatings varies from 0.512 to 0.498 and also depends on the thickness of the layers. A relatively large value of the friction coefficient is due to high roughness and the presence of a droplet fraction on the surface as well as in the volume of the coatings.Публікація Creation of a Prototype of a Multi-function Remote Presence Robot for Physical Research in Electronics(2021) Beresnev, V. M.; Chekubasheva, V. A.; Glukhov, O. V.; Kravchuk, O. O.The article presents methods for constructing and implementing an automated electronic system for collecting and analyzing information about various physical parameters of the environment under conditions of long-term continuous measurements. The system is based on microprocessor devices using wireless technologies with the implementation of the EKF SLAM algorithm for localizing places with an uneven distribution of environmental parameters to minimize pollution of cleanrooms. Also, it can then transmit signals through the operator's computer to the control elements of the room. Thus, the minimization of environmental factors for physical diseases and high-precision equipment is carried out, thereby extending its service life.Публікація Influence of the Bias Potential and Working Gas Pressure on the Properties of the TiSiN/NbN Ion Plasma Multilayer Coating(2022) Horokh, D. V.; Maksakova, O. V.; Klymenko, S. A.; Lytovchenko, S. V.; Beresnev, V. M.; Glukhov, O. V.The phase composition, element distribution, and mechanical properties of the TiSiN/NbN(TiN) multilayer coatings obtained by vacuum arc deposition are anlyzed. The effect of the bias potential on the mechanical and tribological characteristics of the coatings is studied, and the adhesion strengths of the coatings to the substrate are measured. The results of X-ray diffraction stud ies of the coatings show that a two-fold increase in the bias potential leads to increases in all phase and structural parameters—in particular, lattice parameters, crystallite sizes, and microdeformation levels of the components of the coatings. The intensities of δ diffraction peaks of TiN and NbN indicate the presence of a strong (200) texture. Tribotechnical studies of the coatings have shown that they are erased during scratching, but their detachment from the substrate has not been recorded. This means that the coatings are worn by the cohesive mechanism associated with plastic deformation and the for mation of fatigue cracks in the coating volume. Different modes of coating formation correspond to different values of acoustic emission that occurs, depending on the conditions, in the loading zone.Публікація Structure and mechanical properties of multilayer coatings (TiAlCrY)N/ZrN(2019) Novikov, V. Yu.; Beresnev, V. M.; Kolesnikov, D. A.; Ivanov, O. N.; Lytovchenko, S. V.; Stolbovoy, V. A.; Kolodiy, I. V.; Kozachenko, A. O.; Kovaleva, M. G.; Kritsyna, E. V.; Glukhov, O. V.Multiperiodic nitride coatings (TiAlCrY)N/ZrN with different layer thicknesses are formed by vacuum-arc evaporation in a nitrogen atmosphere (0.2…0.6 Pa) of two targets, TiAlCrY and Zr. The targets were located along one straight line at equal distances from the perpendicular axis on which the substrates were placed. The rotation of the axis with the substrates was carried out either continuously or with a fixed delay at the evaporators. The duration of the process was chosen so that the total thickness of the coating (total thickness of the bilayers) was 10…11 μm. The effect of nitrogen pressure and modulation period on the structural-phase state, elemental composition, and mechanical properties of multilayer coatings has been studied. An increase in the partial pressure of nitrogen and, consequently, its content in the coating leads to an increase in hardness. Reducing the thickness of the layers in the coatings increases the adhesive strength of the coatings and does not have a significant effect on the microstresses in the coating.Публікація Structure and Physicomechanical Properties of Superhard Milticomponent Multilayer (TiAlCrY/Zr)/(TiAlCrYN/ZrN) Coating with Double Modulation Period of the Structure(2019) Novikov, V. Yu.; Beresnev, V. M.; Kolesnikov, D. A.; Ivanov, O. N.; Lytovchenko, S. V.; Glukhov, O. V.; Gorokh, D. V.; Kozachenko, A. O.; Krystyna, E. V.; Sirota, V. V.Публікація (TiZr)N/(TiSi)N Maitilayer Nanostructured Coatings obtained by Vacuum Arc Deposition.(2018) Lytovchenko, S. V.; Mazilin, B. A.; Beresnev, V. M.; Stolbovoy, V. A.; Kovalyova, M. G.; Kritsyna, E. V.; Kolodiy, I. V.; Glukhov, O. V.; Malikov, L. V.The paper investigates the structure and properties of nanoscale multilayer coatings based on (TiZr)N and (TiSi)N produced by vacuum arc technique. Also, it provides an analysis of the impact of partial pressure of nitrogen on structural and phase state of coatings. The nitride phases are strongly textured, crystallographic planes (111) of most grains are oriented parallel to the surface. Dimensions of the coherent scattering regions and values of micro-distortions of the lattice have been calculated. The hardness of coatings reached 37.1 GPa, and the adhesion fracture load exceeds 150 N. The process technology ensures high uniformity of and a low defect rate in obtained coatings.