Модели и информационные технологии мониторинга и оптимизации процесса выращивания монокристаллов полупроводников

Abstract

The monograph is the development of methods, models and information technologies for monitoring and optimization of thermal parameters of the process of cultivation of single crystals of semiconductors. The problem of continuous monitoring of the temperature fields of the melt-crystal system in the process of growing and the problem of automated optimization of the parameters of the thermal screen in the heat sink is solved. Designated for scientific and engineering staff, graduate students, and can be used by students of different specialties for acquiring knowledge and practical skills in solving problems of continuous quality management of technological processes.