Mathematical Model of Substrates Formation for Functional Components of Microoptoelectromechanical Sensors

Nevliudov, I.; Chala, О.; Botsman, I.

Публікація:
Mathematical Model of Substrates Formation for Functional Components of Microoptoelectromechanical Sensors

dc.contributor.author	Nevliudov, I.
dc.contributor.author	Chala, О.
dc.contributor.author	Botsman, I.
dc.date.accessioned	2021-11-24T20:39:02Z
dc.date.available	2021-11-24T20:39:02Z
dc.date.issued	2021
dc.description.abstract	A method of technological modes determining for the process of substrates surfaces shaping for the functional components of microoptoelectromechanical systems is proposed, which allows to improve the quality of the substrates. A mathematical model is developed that describes the parameters influence degree of the technological process of the substrates functional surfaces shaping for the microоptoelectromechanical systems components on their roughness and allows to predict the parameters of finished optoelectronic products based on these components. The experimental researches results for obtaining the dependence of substrates surface quality for micromirrors of optical switches on processing modes during the grinding and polishing technological operations are presented.	uk_UA
dc.description.sponsorship	The authors express their gratitude for help and assistance in carrying out the research problem to the scientific research laboratory "MICROELECTROMECHANICAL and MICROPTOELECTROMECHANICAL SYSTEMS" (PRL MEMS AND MOEMS) of the Kharkiv National University of Radio Electronics and the team of the testing laboratory of LLC SPE «UKRINTECH».	uk_UA
dc.identifier.citation	Nevliudov I., Chala O., Botsman I. Mathematical Model of Substrates Formation for Functional Components of Microoptoelectromechanical Sensors / I. Nevliudov, O. Chala, I. Botsman // Manufacturing & Mechatronic Systems 2021: proceedings of the V-st International Conference, Kharkiv. October 21-22, 2021.- Kharkiv, 2021. - P. 15-17.	uk_UA
dc.identifier.uri	https://openarchive.nure.ua/handle/document/18374
dc.language.iso	en	uk_UA
dc.subject	functional component	uk_UA
dc.subject	microoptoelectromechanical systems	uk_UA
dc.subject	technological process	uk_UA
dc.subject	roughness	uk_UA
dc.subject	substrates	uk_UA
dc.title	Mathematical Model of Substrates Formation for Functional Components of Microoptoelectromechanical Sensors	uk_UA
dc.type	Conference proceedings	uk_UA
dspace.entity.type	Publication