Формообразование упругих элементов кремниевых интегральных преобразователей сложной формы

Abstract

The possible constructions of resilient elements are in-process investigational for sensators. On a picture the sketches of the silicic integral module of pressure of matrix type are presented for registration pour distributing of pressures. Four resilient areas in a single construction allow to extend the range of measureable pressures.