Публікація: Production, Structure and Properties of Coatings Based on Al2O3 Obtained by Magnetron Method
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Дата
2020
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Анотація
Al2O3 and Al2O3/ZrO2 multilayer coatings were deposited by the magnetron method by sputtering the
corresponding metal targets in a mixture of oxygen and argon gases. The microstructure of the cross sections
to determine the thickness and elemental composition of the obtained coatings was studied by transmission
and scanning electron microscopy. The surface morphology of Al2O3 coating samples was studied
by scanning probe microscopy. It is shown that the formed Al2O3 coating and the Al2O3/ZrO2 multilayer
coating have a columnar structure with the columns oriented perpendicular to the surface. The columnar
structure of multilayer coatings is not violated during the transition from layer to layer. The coating surface
consists of globules with a diameter of about 20 nm. It was found that the Al2O3 coating has dielectric
properties using the method of impedance spectrometry. Thus, it was shown that the magnetron method
can be used to apply high-quality multilayer dielectric coatings, which can be used as thermal barrier coatings
to protect the blades of high-temperature stages of aircraft engine turbines.
Опис
Ключові слова
Magnetron by sputtering, Multilayer oxide coatings
Бібліографічний опис
O. V. Glukhov / D.А. Kolesniko, I.V. Sudzhanskaya1, I.Yu. Goncharo, S.V. Lytovchenko, V.Yu. Novikov, Е.А. Kudryavtsev1, B.O. Mazilin, Е.V. Krytsyna1, V.M. Beresnev, O.V. Glukhov. Production, Structure and Properties of Coatings Based on Al2O3 Obtained by Magnetron Method. // Journal Of Nano- and Electronic Physics. - Vol. 12. - No 1. - 01022(4pp).