Technological process modes determination for surface formation of substrates for functional components of microoptoelectromechanical systems

Nevliudov, I.; Chala, O.; Botsman, I.

Публікація:
Technological process modes determination for surface formation of substrates for functional components of microoptoelectromechanical systems

dc.contributor.author	Nevliudov, I.
dc.contributor.author	Chala, O.
dc.contributor.author	Botsman, I.
dc.date.accessioned	2021-10-05T08:49:26Z
dc.date.available	2021-10-05T08:49:26Z
dc.date.issued	2021
dc.description.abstract	A method of technological modes determining for the process of substrates surfaces shaping for the functional components of microoptoelectromechanical systems is proposed, which allows to improve the quality of the substrates. A mathematical model is developed that describes the parameters influence degree of the technological process of the substrates functional surfaces shaping for the microptoelectromechanical systems components on their roughness and allows to predict the parameters of finished optoelectronic products based on these components. The experimental researches results for obtaining the dependence of substrates surface quality for micromirrors of optical switches on processing modes during the grinding and polishing technological operations are presented.	uk_UA
dc.identifier.citation	Nevliudov I. S. Determination of technological process modes for surface formation of substrates for functional components of microoptoelectromechanical systems / I. S. Nevliudov, O. O. Chala, I. V. Botsman // Functional Materials. – 2021. – 28(2). – P. 381–385.	uk_UA
dc.identifier.uri	https://openarchive.nure.ua/handle/document/17825
dc.language.iso	en	uk_UA
dc.publisher	Functional Materials	uk_UA
dc.relation.ispartofseries	28 (2);
dc.subject	functional component	uk_UA
dc.subject	microoptoelectromechanical systems	uk_UA
dc.subject	technological process	uk_UA
dc.subject	substrates	uk_UA
dc.title	Technological process modes determination for surface formation of substrates for functional components of microoptoelectromechanical systems	uk_UA
dc.type	Article	uk_UA
dspace.entity.type	Publication