Дослідження технологій вимірювання температури в двухкоординатной площині

Abstract

Currently, various kinds of robotic products, controlled by the program or manually, and aimed at operation as part of large hardware-software complexes for the study of various structures of semiconductor devices, have gained widespread use. The studies were carried out on the example of a two-coordinate device for moving a semiconductor sample, providing electronic control of its movement and pairing the device with a personal computer. The electrical part of the device provides movement of the working plane of the two-coordinate table to the right, left, up and down in automatic and step-by-step modes.