Публікація: Accelerometers production technological process decomposition parameters model
| dc.contributor.author | Nevlydov, I. | |
| dc.contributor.author | Yevsieiev, V. | |
| dc.contributor.author | Miliutina, S. | |
| dc.contributor.author | Bortnikova, V. | |
| dc.date.accessioned | 2017-01-15T20:17:54Z | |
| dc.date.available | 2017-01-15T20:17:54Z | |
| dc.date.issued | 2016 | |
| dc.description.abstract | In this paper the accelerometer production technological process parameters decomposition model is described. | uk_UA |
| dc.identifier.isbn | 978-1-5090-1414-9 | |
| dc.identifier.issn | 978-617-607-913-2 | |
| dc.identifier.other | 10.1109/MEMSTECH.2016.7507506 | |
| dc.identifier.uri | http://openarchive.nure.ua/handle/document/3508 | |
| dc.language.iso | en_US | uk_UA |
| dc.publisher | Accelerometers production technological process decomposition parameters model / I. Nevludov, V. Yevsieiev, S. Milutina, V. Bortnikova // Perspective Technologies and Methods in MEMS Design : proceedings of the XII International Conference ( MEMSTECH'2016), Lviv - Polyana Svalyava, Ukraine, April 20-24, 2016. | uk_UA |
| dc.subject | decomposition | uk_UA |
| dc.subject | technological process | uk_UA |
| dc.subject | MEMS | uk_UA |
| dc.subject | accelerometer | uk_UA |
| dc.title | Accelerometers production technological process decomposition parameters model | uk_UA |
| dc.type | Thesis | uk_UA |
| dspace.entity.type | Publication |
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