Моделювання компонентів керування мемс зі зворотними зв’язками з використанням Matlab/Simulink

Abstract

The purpose of the work is to develop procedures for modeling MEMS components in feedback control systems using the Matlab/Simulink mathematical package. Analysis of automatic control systems with PID controllers and analysis of the general structure of the microsystem with feedback was carried out. Models of the thermal parameter regulation system were developed in the Matlab/Simulink environment, and experimental research was carried out.