Influence of the Bias Potential and Working Gas Pressure on the Properties of the TiSiN/NbN Ion Plasma Multilayer Coating

Horokh, D. V.; Maksakova, O. V.; Klymenko, S. A.; Lytovchenko, S. V.; Beresnev, V. M.; Glukhov, O. V.

Публікація:
Influence of the Bias Potential and Working Gas Pressure on the Properties of the TiSiN/NbN Ion Plasma Multilayer Coating

dc.contributor.author	Horokh, D. V.
dc.contributor.author	Maksakova, O. V.
dc.contributor.author	Klymenko, S. A.
dc.contributor.author	Lytovchenko, S. V.
dc.contributor.author	Beresnev, V. M.
dc.contributor.author	Glukhov, O. V.
dc.date.accessioned	2024-02-19T21:07:58Z
dc.date.available	2024-02-19T21:07:58Z
dc.date.issued	2022
dc.description.abstract	The phase composition, element distribution, and mechanical properties of the TiSiN/NbN(TiN) multilayer coatings obtained by vacuum arc deposition are anlyzed. The effect of the bias potential on the mechanical and tribological characteristics of the coatings is studied, and the adhesion strengths of the coatings to the substrate are measured. The results of X-ray diffraction stud ies of the coatings show that a two-fold increase in the bias potential leads to increases in all phase and structural parameters—in particular, lattice parameters, crystallite sizes, and microdeformation levels of the components of the coatings. The intensities of δ diffraction peaks of TiN and NbN indicate the presence of a strong (200) texture. Tribotechnical studies of the coatings have shown that they are erased during scratching, but their detachment from the substrate has not been recorded. This means that the coatings are worn by the cohesive mechanism associated with plastic deformation and the for mation of fatigue cracks in the coating volume. Different modes of coating formation correspond to different values of acoustic emission that occurs, depending on the conditions, in the loading zone.
dc.identifier.citation	Influence of the Bias Potential and Working Gas Pressure on the Properties of the TiSiN/NbN Ion Plasma Multilayer Coating / D. V. Horokh, O. V. Maksakova, S. A. Klymenko, S. V. Lytovchenko, V. M. Beresnev, O. V. Glukhov // Journal of Superhard Materials. – 2022. – Vol. 44, № 6. – pp. 413–420.
dc.identifier.doi	https://doi.org/10.3103/S1063457622060041
dc.identifier.uri	https://openarchive.nure.ua/handle/document/25613
dc.language.iso	en
dc.subject	vacuum–arc sputtering
dc.subject	multilayer coatings
dc.subject	bias potential
dc.subject	hardness
dc.subject	adhesive strength
dc.title	Influence of the Bias Potential and Working Gas Pressure on the Properties of the TiSiN/NbN Ion Plasma Multilayer Coating
dc.type	Article
dspace.entity.type	Publication