Публікація: Technological Process Identification Method for Accelerometers MEMS
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Technological Process Identification Method for Accelerometers MEMS /
I. Nevlyudov, V. Yevsieiev, S. Miliutina, V. Bortnikova // CAD in Machinery Design Implementation and Educational Issues : proceedings of the XXIV International Ukrainian-Polish Conference (CADMD' 2016), Lviv, Ukraine, October 21-22, 2016. - Lviv : Lviv Polytechnic National University, 2016. -
P. 23-24.
Анотація
Proposed accelerometers production technological process identification method allows to simplify a technological process choice for accelerometers MEMS design.