Please use this identifier to cite or link to this item: http://openarchive.nure.ua/handle/document/3510
Title: Technological Process Identification Method for Accelerometers MEMS
Authors: Nevlyudov, I.
Yevsieiev, V.
Miliutina, S.
Bortnikova, V.
Keywords: CAM
Technological Process
Accelerometers
MEMS
Issue Date: 2016
Publisher: CADMD 2016. XXIV International Ukrainian-Polish Conference
Abstract: Proposed accelerometers production technological process identification method allows to simplify a technological process choice for accelerometers MEMS design.
URI: http://openarchive.nure.ua/handle/document/3510
ISBN: 978-617-607977-4
Appears in Collections:Кафедра комп'ютерно-інтегрованих технологій, автоматизації та мехатроніки (КІТАМ)

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