Technological Process Identification Method for Accelerometers MEMS

Публікація:
Technological Process Identification Method for Accelerometers MEMS

dc.contributor.author	Nevlyudov, I.
dc.contributor.author	Yevsieiev, V.
dc.contributor.author	Miliutina, S.
dc.contributor.author	Bortnikova, V.
dc.date.accessioned	2017-01-15T20:52:55Z
dc.date.available	2017-01-15T20:52:55Z
dc.date.issued	2016
dc.description.abstract	Proposed accelerometers production technological process identification method allows to simplify a technological process choice for accelerometers MEMS design.	uk_UA
dc.identifier.isbn	978-617-607977-4
dc.identifier.uri	http://openarchive.nure.ua/handle/document/3510
dc.language.iso	en_US	uk_UA
dc.publisher	Technological Process Identification Method for Accelerometers MEMS / I. Nevlyudov, V. Yevsieiev, S. Miliutina, V. Bortnikova // CAD in Machinery Design Implementation and Educational Issues : proceedings of the XXIV International Ukrainian-Polish Conference (CADMD' 2016), Lviv, Ukraine, October 21-22, 2016. - Lviv : Lviv Polytechnic National University, 2016. - P. 23-24.	uk_UA
dc.subject	CAM	uk_UA
dc.subject	technological process	uk_UA
dc.subject	accelerometers	uk_UA
dc.subject	MEMS	uk_UA
dc.title	Technological Process Identification Method for Accelerometers MEMS	uk_UA
dc.type	Thesis	uk_UA
dspace.entity.type	Publication