Please use this identifier to cite or link to this item: http://openarchive.nure.ua/handle/document/3508
Title: Accelerometers production technological process decomposition parameters model
Authors: Nevlydov, I.
Yevsieiev, V.
Miliutina, S.
Bortnikova, V.
Keywords: decomposition
technological process
MEMS
Accelerometer
Issue Date: 2016
Publisher: 2016 XII International Conference on Perspective Technologies and Methods in MEMS Design (MEMSTECH)
Abstract: In this paper the accelerometer production technological process parameters decomposition model is described.
URI: http://openarchive.nure.ua/handle/document/3508
ISBN: 978-1-5090-1414-9
ISSN: 978-617-607-913-2
Appears in Collections:Кафедра комп'ютерно-інтегрованих технологій, автоматизації та мехатроніки (КІТАМ)

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