Accelerometers production technological process decomposition parameters model

Публікація:
Accelerometers production technological process decomposition parameters model

dc.contributor.author	Nevlydov, I.
dc.contributor.author	Yevsieiev, V.
dc.contributor.author	Miliutina, S.
dc.contributor.author	Bortnikova, V.
dc.date.accessioned	2017-01-15T20:17:54Z
dc.date.available	2017-01-15T20:17:54Z
dc.date.issued	2016
dc.description.abstract	In this paper the accelerometer production technological process parameters decomposition model is described.	uk_UA
dc.identifier.isbn	978-1-5090-1414-9
dc.identifier.issn	978-617-607-913-2
dc.identifier.other	10.1109/MEMSTECH.2016.7507506
dc.identifier.uri	http://openarchive.nure.ua/handle/document/3508
dc.language.iso	en_US	uk_UA
dc.publisher	Accelerometers production technological process decomposition parameters model / I. Nevludov, V. Yevsieiev, S. Milutina, V. Bortnikova // Perspective Technologies and Methods in MEMS Design : proceedings of the XII International Conference ( MEMSTECH'2016), Lviv - Polyana Svalyava, Ukraine, April 20-24, 2016.	uk_UA
dc.subject	decomposition	uk_UA
dc.subject	technological process	uk_UA
dc.subject	MEMS	uk_UA
dc.subject	accelerometer	uk_UA
dc.title	Accelerometers production technological process decomposition parameters model	uk_UA
dc.type	Thesis	uk_UA
dspace.entity.type	Publication