Резонаторні та хвилеводні НВЧ вимірювальні перетворювачі для діагностики напівпровідникових матеріалів

Abstract

In our study, a block diagram of installations for diagnostics of electrophysical properties of materials (h, tgδ) by waveguide and resonator methods was presented. The models of the measuring devices studied and the results of calculations of such structures are presented. Resonator methods have been found to be most suitable for the diagnosis of the electrophysical properties of materials, as they have a higher sensitivity compared to waveguide OPs in the range of tgδ≈10-2. The use of resonator waveforms makes it easier to diagnose the electrophysical properties of materials, namely, to identify semiconductor and dielectric materials in the microwave field.