Nevlyudov, I.Botsman, I.Tesliuk, S.2021-03-022021-03-022021Nevlyudov I., Botsman I., Tesliuk S. Structural diagram of automated quality control process of silicon wafers during their surface shaping / I. Nevlyudov, I. Botsman, S. Tesliuk // Theoretical and scientific bases of development of scientific thought : abstracts of V International Scientific and Practical Conference, Rome, Italy, February 16-19, 2021. – Rome : International Science Group. – 2021. – Р. 612–615.978-1-63684-356-8http://openarchive.nure.ua/handle/document/14755ensilicon wafercontrol processsurface shapingquality controlConference proceedings