Nevliudov, I.Chala, O.Botsman, I.2021-10-052021-10-052021Nevliudov I. S. Determination of technological process modes for surface formation of substrates for functional components of microoptoelectromechanical systems / I. S. Nevliudov, O. O. Chala, I. V. Botsman // Functional Materials. – 2021. – 28(2). – P. 381–385.https://openarchive.nure.ua/handle/document/17825A method of technological modes determining for the process of substrates surfaces shaping for the functional components of microoptoelectromechanical systems is proposed, which allows to improve the quality of the substrates. A mathematical model is developed that describes the parameters influence degree of the technological process of the substrates functional surfaces shaping for the microptoelectromechanical systems components on their roughness and allows to predict the parameters of finished optoelectronic products based on these components. The experimental researches results for obtaining the dependence of substrates surface quality for micromirrors of optical switches on processing modes during the grinding and polishing technological operations are presented.enfunctional componentmicrooptoelectromechanical systemstechnological processsubstratesArticle