Nevlydov, I.Yevsieiev, V.Miliutina, S.Bortnikova, V.2017-01-152017-01-152016978-1-5090-1414-9978-617-607-913-210.1109/MEMSTECH.2016.7507506http://openarchive.nure.ua/handle/document/3508In this paper the accelerometer production technological process parameters decomposition model is described.en-USdecompositiontechnological processMEMSaccelerometerThesis