Nevlyudov, I.Yevsieiev, V.Miliutina, S.Bortnikova, V.2017-01-152017-01-152016978-617-607977-4http://openarchive.nure.ua/handle/document/3510Proposed accelerometers production technological process identification method allows to simplify a technological process choice for accelerometers MEMS design.en-USCAMtechnological processaccelerometersMEMSTechnological Process Identification Method for Accelerometers MEMSThesis