Filipenko, O.Chala, O.Bortnikova, V.Sychova, O.Botsman, I.2023-04-132023-04-132019Impact of technological operations parameters on moems components formation / O. Filipenko, O. Chala, V. Bortnikova, O. Sychova, I. Botsman // Conference on Advanced Optoelectronics and Lasers : proceedings of the IEEE 8th International Conference (CAOL'2019), Sozopol, Bulgaria, September 6-8, 2019. – P. 371–374.https://openarchive.nure.ua/handle/document/22616In the paper the modeling results for the process of MOEMS functional surfaces shaping are presented. The significance and magnitude of factors that directly affect the shaping process of MOEMS functional surfaces were determined.encomponentMOEMSshapingopticalswitchermicro mirrorgrindingConference proceedings