Lytovchenko, S. V.Mazilin, B. A.Beresnev, V. M.Stolbovoy, V. A.Kovalyova, M. G.Kritsyna, E. V.Kolodiy, I. V.Glukhov, O. V.Malikov, L. V.2020-08-062020-08-062018(TiZr)N/(TiSi)N Maitilayer Nanostructured Coatings obtained by Vacuum Arc Deposition / O.V. Glukhov, S. V. Lytovchenko, B. А. Mazilin, V. M. Beresnev, V. А. Stolbovoy, M. G. Kovalyova, Е. V. Kritsyna, I. V. Kolodiy, O. V. Glukhov, L. V. Malikov // Journal of Nano- and Electronic Physics. - 2018. - vol. 10. - no 5. - p.05041(5pp).DOI: 10.21272/jnep.10(5).05041http://openarchive.nure.ua/handle/document/12628The paper investigates the structure and properties of nanoscale multilayer coatings based on (TiZr)N and (TiSi)N produced by vacuum arc technique. Also, it provides an analysis of the impact of partial pressure of nitrogen on structural and phase state of coatings. The nitride phases are strongly textured, crystallographic planes (111) of most grains are oriented parallel to the surface. Dimensions of the coherent scattering regions and values of micro-distortions of the lattice have been calculated. The hardness of coatings reached 37.1 GPa, and the adhesion fracture load exceeds 150 N. The process technology ensures high uniformity of and a low defect rate in obtained coatings.enNitride coatingsMultilayer coatingComposition of elementsStructureMicrohardnessAdhesive strength.Article